ANTOŠ, Roman, Jaromír PIŠTORA, Jan MISTRÍK, Tomuo YAMAGUCHI, Shinji YAMAGUCHI, Masahiro HORIE, Štefan VIŠŇOVSKÝ a Yoshichika OTANI. Convergence properties of critical dimension measurements by spectroscopic ellipsometry on gratings made of various materials. 2006. DOI: 10.1063/1.2337256. ISSN 1089-7550.
Uložit do Citace PRO