Handbook of semiconductor manufacturing technology
Doering Robert, Nishi YoshioKniha
Citace v seznamu literatury:
DOERING, Robert a NISHI, Yoshio (ed.). Handbook of semiconductor manufacturing technology. 2nd ed. Boca Raton: CRC Press, c2008. ISBN 9781574446753. Dostupné také z: http://www.loc.gov/catdir/toc/ecip077/2006102599.html.