Chemical vapour deposition
Jones Anthony C., Hitchman Michael L.Kniha
Citace v seznamu literatury:
JONES, Anthony C. a HITCHMAN, Michael L. Chemical vapour deposition: precursors, processes and applications. Cambridge, UK: Royal Society of Chemistry, c2009. ISBN 9781847558794. Dostupné také z: https://proxy.k.utb.cz/login?url=http://app.knovel.com/web/toc.v/cid:kpCVDPPA04.