Handbook of physical vapor deposition (PVD) processing
Mattox D. M.Kniha
Citace v seznamu literatury:
MATTOX, D. M. Handbook of physical vapor deposition (PVD) processing. 2nd ed. Norwich, N.Y.: William Andrew, c2010. ISBN 9780815520382. Dostupné také z: https://proxy.k.utb.cz/login?url=http://app.knovel.com/web/toc.v/cid:kpHPVDPV04.