Handbook of silicon wafer cleaning technology
Reinhardt Karen A., Kern WernerKniha
Citace v seznamu literatury:
REINHARDT, Karen A. a KERN, Werner. Handbook of silicon wafer cleaning technology. 2nd ed. Materials science & process technology series. Norwich, NY: William Andrew, ©2008. ISBN 9780815517733. Dostupné také z: https://proxy.k.utb.cz/login?url=http://app.knovel.com/hotlink/toc/id:kpHSWCTE03/handbook_of_silicon_wafer_cleaning_technology_2nd_edition.