Handbook of semiconductor wafer cleaning technology
Kern WernerKniha
Citace v seznamu literatury:
KERN, Werner. Handbook of semiconductor wafer cleaning technology: science, technology, and applications. Materials science and process technology series. Electronic materials and process technology. Park Ridge, N.J., U.S.A.: Noyes Publications, c1993. ISBN 9781591240938. Dostupné také z: https://proxy.k.utb.cz/login?url=http://app.knovel.com/hotlink/toc/id:kpHSWCTSTB/handbook_of_semiconductor_wafer_cleaning_technology__science_technology_and_applications.