Semiconductor materials and process technology handbook
McGuire G. E.Kniha
Citace v seznamu literatury:
MCGUIRE, G. E. Semiconductor materials and process technology handbook: for very large scale integration (VLSI) and ultra large scale integration (ULSI). Materials science and process technology series. Park Ridge, N.J.: Noyes Publicatons, c1988. ISBN 9781591242529. Dostupné také z: https://proxy.k.utb.cz/login?url=http://app.knovel.com/hotlink/toc/id:kpSMPTH001/semiconductor_materials_and_process_technology_handbook.