Handbook of VLSI microlithography
Helbert John N.Kniha
Citace v seznamu literatury:
HELBERT, John N. Handbook of VLSI microlithography: principles, technology, and applications. 2nd ed. Materials science and process technology series. Electronic materials and process technology. Park Ridge, N.J.: Noyes Publications, c2001. ISBN 9781591242758. Dostupné také z: https://proxy.k.utb.cz/login?url=http://app.knovel.com/hotlink/toc/id:kpHVLSIMP1/handbook_of_vlsi_microlithography__principles_technology_and_applications_2nd_edition.