Handbook of chemical vapor deposition

PIERSON, Hugh O. Handbook of chemical vapor deposition: principles, technology, and applications. 2nd ed. Materials science and process technology series. Electronic materials and process technology. Norwich, N.Y.: Noyes Publications, 1999. ISBN 9781591240303. Dostupné také z: https://proxy.k.utb.cz/login?url=http://app.knovel.com/hotlink/toc/id:kpHCVDCVD4/handbook_of_chemical_vapor_deposition_cvd__principles_technology_and_applications_2nd_edition.