Handbook of multilevel metallization for integrated circuits
Wilson Syd R., Tracy Clarence J., Freeman John L.Kniha
Citace v seznamu literatury:
WILSON, Syd R.; TRACY, Clarence J. a FREEMAN, John L. Handbook of multilevel metallization for integrated circuits: materials, technology, and applications. Materials science and process technology series. Electronic materials and process technology. Park Ridge, N.J.: Noyes Publications, c1993. ISBN 9781591243649. Dostupné také z: https://proxy.k.utb.cz/login?url=http://app.knovel.com/hotlink/toc/id:kpHMMICMTB/handbook_of_multilevel_metallization_for_integrated_circuits__materials_technology_and_applications.