Micro mechanical systems
Fukuda T., Menz W.Kniha
Citace v seznamu literatury:
FUKUDA, T. a MENZ, W. Micro mechanical systems: principles and technology. Handbook of sensors and actuators. Amsterdam: Elsevier, 1998. ISBN 9780080536545. Dostupné také z: https://proxy.k.utb.cz/login?url=http://app.knovel.com/hotlink/toc/id:kpMMSPT001/micro_mechanical_systems__principles_and_technology.